diff --git a/bin/sh/Makefile b/bin/sh/Makefile
index a3e2c405bcb8..ee7dc140e27c 100644
--- a/bin/sh/Makefile
+++ b/bin/sh/Makefile
@@ -39,6 +39,7 @@ CLEANFILES+= ${GENSRCS} ${GENHDRS}
 build-tools: mknodes mksyntax
 
 .ORDER: builtins.c builtins.h
+builtins.h: .NOMETA
 builtins.c builtins.h: mkbuiltins builtins.def
 	sh ${.CURDIR}/mkbuiltins ${.CURDIR}
 
@@ -51,10 +52,12 @@ mknodes: mknodes.o ${BUILD_TOOLS_META}
 mksyntax: mksyntax.o ${BUILD_TOOLS_META}
 
 .ORDER: nodes.c nodes.h
+nodes.h: .NOMETA
 nodes.c nodes.h: mknodes nodetypes nodes.c.pat
 	${BTOOLSPATH:U.}/mknodes ${.CURDIR}/nodetypes ${.CURDIR}/nodes.c.pat
 
 .ORDER: syntax.c syntax.h
+syntax.h: .NOMETA
 syntax.c syntax.h: mksyntax
 	${BTOOLSPATH:U.}/mksyntax
 
diff --git a/kerberos5/Makefile.inc b/kerberos5/Makefile.inc
index 0c3d69682d19..82922cc10749 100644
--- a/kerberos5/Makefile.inc
+++ b/kerberos5/Makefile.inc
@@ -35,6 +35,7 @@ ETSRCS=	\
 .for _ET in ${ET:T:R}
 .if ${SRCS:M${_ET}.[ch]} != ""
 .ORDER: ${_ET}.h ${_ET}.c
+${_ET}.c: .NOMETA
 ${_ET}.c ${_ET}.h: ${ET}
 	compile_et ${.ALLSRC}
 CLEANFILES+=	${_ET}.h ${_ET}.c
diff --git a/kerberos5/lib/libasn1/Makefile b/kerberos5/lib/libasn1/Makefile
index 349a8f755d91..d9594392cb76 100644
--- a/kerberos5/lib/libasn1/Makefile
+++ b/kerberos5/lib/libasn1/Makefile
@@ -56,11 +56,13 @@ INCS+=	krb5_asn1.h \
 	kx509_asn1.h
 
 .ORDER: ${GEN_CMS}
+${GEN_CMS:[2..-1]}: .NOMETA
 ${GEN_CMS}: cms.asn1 cms.opt
 	${ASN1_COMPILE} --one-code-file \
 		--option-file=${.ALLSRC:M*.opt} ${.ALLSRC:M*.asn1} cms_asn1
 
 .ORDER: ${GEN_RFC2459}
+${GEN_RFC2459:[2..-1]}: .NOMETA
 ${GEN_RFC2459}: rfc2459.asn1
 	${ASN1_COMPILE} \
 		--one-code-file \
@@ -72,6 +74,7 @@ ${GEN_RFC2459}: rfc2459.asn1
 		--sequence=CRLDistributionPoints ${.ALLSRC:M*.asn1} rfc2459_asn1
 
 .ORDER: ${GEN_K5}
+${GEN_K5:[2..-1]}: .NOMETA
 ${GEN_K5}: krb5.asn1 krb5.opt
 	${ASN1_COMPILE} \
 		--one-code-file \
@@ -79,31 +82,37 @@ ${GEN_K5}: krb5.asn1 krb5.opt
 		${.ALLSRC:M*.asn1} krb5_asn1
 
 .ORDER: ${GEN_PKINIT}
+${GEN_PKINIT:[2..-1]}: .NOMETA
 ${GEN_PKINIT}: pkinit.asn1
 	${ASN1_COMPILE} --one-code-file \
 		${.ALLSRC:M*.asn1} pkinit_asn1
 
 .ORDER: ${GEN_PKCS8}
+${GEN_PKCS8:[2..-1]}: .NOMETA
 ${GEN_PKCS8}: pkcs8.asn1
 	${ASN1_COMPILE} --one-code-file \
 		${.ALLSRC:M*.asn1} pkcs8_asn1
 
 .ORDER: ${GEN_PKCS9}
+${GEN_PKCS9:[2..-1]}: .NOMETA
 ${GEN_PKCS9}: pkcs9.asn1
 	${ASN1_COMPILE} --one-code-file \
 		${.ALLSRC:M*.asn1} pkcs9_asn1
 
 .ORDER: ${GEN_PKCS12}
+${GEN_PKCS12:[2..-1]}: .NOMETA
 ${GEN_PKCS12}: pkcs12.asn1
 	${ASN1_COMPILE} --one-code-file \
 		${.ALLSRC:M*.asn1} pkcs12_asn1
 
 .ORDER: ${GEN_DIGEST}
+${GEN_DIGEST:[2..-1]}: .NOMETA
 ${GEN_DIGEST}: digest.asn1
 	${ASN1_COMPILE} --one-code-file \
 		${.ALLSRC:M*.asn1} digest_asn1
 
 .ORDER: ${GEN_KX509}
+${GEN_KX509:[2..-1]}: .NOMETA
 ${GEN_KX509}: kx509.asn1
 	${ASN1_COMPILE} --one-code-file \
 		${.ALLSRC:M*.asn1} kx509_asn1
diff --git a/kerberos5/lib/libgssapi_spnego/Makefile b/kerberos5/lib/libgssapi_spnego/Makefile
index 5e54e95f7e93..41e2a6425d2a 100644
--- a/kerberos5/lib/libgssapi_spnego/Makefile
+++ b/kerberos5/lib/libgssapi_spnego/Makefile
@@ -38,6 +38,7 @@ CLEANFILES=	${GEN} ${GEN:S/.x$/.c/:S/.hx$/.h/} \
 		spnego_asn1_files spnego_asn1-template.c
 
 .ORDER: ${GEN}
+${GEN:[2..-1]}: .NOMETA
 ${GEN}: spnego.asn1 spnego.opt
 	${ASN1_COMPILE} --option-file=${.ALLSRC:M*.opt} \
 		${.ALLSRC:M*.asn1} spnego_asn1
diff --git a/kerberos5/lib/libhdb/Makefile b/kerberos5/lib/libhdb/Makefile
index 5f60c6023807..2507ee62002c 100644
--- a/kerberos5/lib/libhdb/Makefile
+++ b/kerberos5/lib/libhdb/Makefile
@@ -86,6 +86,7 @@ CLEANFILES=	${GEN} ${GEN:S/.x$/.c/:S/.hx$/.h/} hdb_asn1_files \
 		hdb_asn1-template.[ch]*
 
 .ORDER: ${GEN}
+${GEN:[2..-1]}: .NOMETA
 ${GEN}: hdb.asn1
 	${ASN1_COMPILE} ${.ALLSRC:M*.asn1} hdb_asn1
 
diff --git a/kerberos5/lib/libhx509/Makefile b/kerberos5/lib/libhx509/Makefile
index 2e8564b023e7..553eac13f0e9 100644
--- a/kerberos5/lib/libhx509/Makefile
+++ b/kerberos5/lib/libhx509/Makefile
@@ -269,16 +269,19 @@ CLEANFILES= ${GEN} ${GEN:S/.x$/.c/:S/.hx$/.h/} ocsp_asn1_files \
 INCS+=	ocsp_asn1.h pkcs10_asn1.h crmf_asn1.h
 
 .ORDER: ${GEN_OCSP}
+${GEN_OCSP:[2..-1]}: .NOMETA
 ${GEN_OCSP}: ocsp.asn1 ocsp.opt
 	${ASN1_COMPILE} --option-file=${.ALLSRC:M*.opt} \
 	 ${.ALLSRC:M*.asn1} ocsp_asn1
 
 .ORDER: ${GEN_PKCS10}
+${GEN_PKCS10:[2..-1]}: .NOMETA
 ${GEN_PKCS10}: pkcs10.asn1 pkcs10.opt
 	${ASN1_COMPILE} --option-file=${.ALLSRC:M*.opt} \
 	${.ALLSRC:M*.asn1} pkcs10_asn1
 
 .ORDER: ${GEN_CRMF}
+${GEN_CRMF:[2..-1]}: .NOMETA
 ${GEN_CRMF}: crmf.asn1
 	${ASN1_COMPILE} ${.ALLSRC:M*.asn1} crmf_asn1
 
diff --git a/share/mk/bsd.dep.mk b/share/mk/bsd.dep.mk
index 92487eaf98fe..0d53d4b4bb04 100644
--- a/share/mk/bsd.dep.mk
+++ b/share/mk/bsd.dep.mk
@@ -107,6 +107,7 @@ SRCS:=	${SRCS:S/${_YSRC}/${_YC}/}
 CLEANFILES+= ${_YC}
 .if !empty(YFLAGS:M-d) && !empty(SRCS:My.tab.h)
 .ORDER: ${_YC} y.tab.h
+y.tab.h: .NOMETA
 ${_YC} y.tab.h: ${_YSRC}
 	${YACC} ${YFLAGS} ${.ALLSRC}
 	cp y.tab.c ${_YC}
@@ -114,6 +115,7 @@ CLEANFILES+= y.tab.c y.tab.h
 .elif !empty(YFLAGS:M-d)
 .for _YH in ${_YC:R}.h
 .ORDER: ${_YC} ${_YH}
+${_YH}: .NOMETA
 ${_YC} ${_YH}: ${_YSRC}
 	${YACC} ${YFLAGS} -o ${_YC} ${.ALLSRC}
 SRCS+=	${_YH}
diff --git a/share/mk/bsd.snmpmod.mk b/share/mk/bsd.snmpmod.mk
index ccd57b7c7b24..b3aab0626a8e 100644
--- a/share/mk/bsd.snmpmod.mk
+++ b/share/mk/bsd.snmpmod.mk
@@ -11,6 +11,7 @@ ${MOD}_oid.h: ${MOD}_tree.def ${EXTRAMIBDEFS} ${EXTRAMIBSYMS}
 	cat ${.ALLSRC} | gensnmptree -e ${XSYM} > ${.TARGET}
 
 .ORDER: ${MOD}_tree.c ${MOD}_tree.h
+${MOD}_tree.h: .NOMETA
 ${MOD}_tree.c ${MOD}_tree.h: ${MOD}_tree.def ${EXTRAMIBDEFS}
 	cat ${.ALLSRC} | gensnmptree -p ${MOD}_
 
diff --git a/usr.sbin/acpi/iasl/Makefile b/usr.sbin/acpi/iasl/Makefile
index 7ba08ffd5b94..4217c967a181 100644
--- a/usr.sbin/acpi/iasl/Makefile
+++ b/usr.sbin/acpi/iasl/Makefile
@@ -97,6 +97,7 @@ aslcompiler.y: ${PARSER}
 	    ${ACPICA_DIR}/compiler/aslparser.y > ${.TARGET}
 
 .ORDER: aslcompilerparse.c aslcompilerparse.h
+aslcompilerparse.h: .NOMETA
 aslcompilerparse.c aslcompilerparse.h: aslcompiler.y
 	${YACC} ${YFLAGS} -pAslCompiler -oaslcompilerparse.c ${.ALLSRC}
 
@@ -107,6 +108,7 @@ dtparserlex.c: dtparser.l
 	${LEX} ${LFLAGS} -PDtParser -o${.TARGET} ${.ALLSRC}
 
 .ORDER: dtparserparse.c dtparserparse.h
+dtparserparse.h: .NOMETA
 dtparserparse.c dtparserparse.h: dtparser.y
 	${YACC} ${YFLAGS} -pDtParser -odtparserparse.c ${.ALLSRC}
 
@@ -117,6 +119,7 @@ prparserlex.c: prparser.l
 	${LEX} ${LFLAGS} -PPrParser -o${.TARGET} ${.ALLSRC}
 
 .ORDER: prparserparse.c prparserparse.h
+prparserparse.h: .NOMETA
 prparserparse.c prparserparse.h: prparser.y
 	${YACC} ${YFLAGS} -pPrParser -oprparserparse.c ${.ALLSRC}
 
diff --git a/usr.sbin/bsnmpd/bsnmpd/Makefile b/usr.sbin/bsnmpd/bsnmpd/Makefile
index e4106e0a42a8..722116061cd5 100644
--- a/usr.sbin/bsnmpd/bsnmpd/Makefile
+++ b/usr.sbin/bsnmpd/bsnmpd/Makefile
@@ -40,6 +40,7 @@ oid.h: tree.def Makefile
 	gensnmptree -e ${XSYM} < ${.ALLSRC:M*.def} > ${.TARGET}
 
 .ORDER: tree.c tree.h
+tree.h: .NOMETA
 tree.c tree.h: tree.def
 	gensnmptree -l < ${.ALLSRC}